Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition): Richard C. Jaeger: 9780201444940


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Publication Date: October 27, 2001 | ISBN-10: 0201444941 ISBN-13 :978-0,201,444,940 Edition: 2
This introductory book assumes a minimum knowledge of the presence of integrated circuits and electronic components, such as resistors, diodes, MOS and bipolar transistors of the terminal behavior. It presents the basic information needed to give readers a more advanced processing and design. Mainly used in the manufacturing process, including lithography, oxidation, diffusion, ion implementation, as well as the thin film deposition. Including interconnection technology, packaging and production. Readers interested in the areas of solid-state devices and integrated circuits manufacturing.