Semiconductor Devices - Physics And Technology
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Simon M. Sze, 2012
ISBN10: n/a ISBN13: 9780470537947
Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.